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doi:10.22028/D291-37569
Title: | Compensation of siloxane poisoning of metal oxide semi-conductor gas sensors in temperature cycled operation |
Author(s): | Schultealbert, Caroline Baur, Tobias Sauerwald, Tilman Schütze, Andreas |
Editor(s): | Gerlach, Gerald Sommer, Klaus-Dieter |
Language: | English |
Title: | SMSI 2020 : Sensor and Measurement Science International : 22-25 June 2020, Nuremberg, Germany |
Pages: | 197-198 |
Publisher/Platform: | AMA Service GmbH |
Year of Publication: | 2020 |
Place of publication: | Wunstorf |
Place of the conference: | Nürnberg, Germany |
Free key words: | metal oxide semiconductor gas sensor siloxanes poisoning stability |
DDC notations: | 600 Technology |
Publikation type: | Conference Paper |
Abstract: | We present a method for quantifying the degradation state due to siloxane poisoning of a metal oxide semiconductor gas sensor using temperature cycled operation. The time constant for the generation of surface charge at high temperature increases through poisoning and is only slightly dependent on the gas atmosphere. In addition to indicating a necessary sensor replacement, this signal can also be used for drift compensation based on the exponential relation between sensor signal and this time constant. |
DOI of the first publication: | 10.5162/SMSI2020/P1.2 |
URL of the first publication: | https://www.ama-science.org/proceedings/details/3709 |
Link to this record: | urn:nbn:de:bsz:291--ds-375698 hdl:20.500.11880/33993 http://dx.doi.org/10.22028/D291-37569 |
ISBN: | 978-3-9819376-2-6 |
Date of registration: | 13-Oct-2022 |
Faculty: | NT - Naturwissenschaftlich- Technische Fakultät |
Department: | NT - Systems Engineering |
Professorship: | NT - Prof. Dr. Andreas Schütze |
Collections: | SciDok - Der Wissenschaftsserver der Universität des Saarlandes |
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