Please use this identifier to cite or link to this item:
doi:10.22028/D291-34581
Title: | Using the Nonlinear Duffing Effect of Piezoelectric Micro-Oscillators for Wide-Range Pressure Sensing |
Author(s): | Zengerle, Tobias Stopp, Michael Ababneh, Abdallah Seidel, Helmut |
Language: | English |
Title: | Actuators |
Volume: | 10 |
Issue: | 8 |
Publisher/Platform: | MDPI |
Year of Publication: | 2021 |
Free key words: | MEMS oscillator nonlinearity pressure sensor roof-tile-shaped mode AlN |
DDC notations: | 500 Science |
Publikation type: | Journal Article |
Abstract: | This paper investigates the resonant behaviour of silicon-based micro-oscillators with a length of 3600 µm, a width of 1800 µm and a thickness of 10 µm over a wide range of ambient gas (N2 ) pressures, extending over six orders of magnitude from 10−3 mbar to 900 mbar. The oscillators are actuated piezoelectrically by a thin-film aluminium-nitride (AlN) layer, with the cantilever coverage area being varied from 33% up to 100%. The central focus is on nonlinear Duffing effects, occurring at higher oscillation amplitudes. A theoretical background is provided. All relevant parameters describing a Duffing oscillator, such as stiffness parameters for each coverage size as well as for different bending modes and more complex modes, are extracted from the experimental data. The so-called 2nd roof-tile-shaped mode showed the highest stiffness value of −97.3·107 m−2 s −2 . Thus, it was chosen as being optimal for extended range pressure measurements. Interestingly, both a spring softening effect and a spring hardening effect were observed in this mode, depending on the percentage of the AlN coverage area. The Duffing-effect-induced frequency shift was found to be optimal for obtaining the highest pressure sensitivity, while the size of the hysteresis loop is also a very useful parameter because of the possibility of eliminating the temperature influences and long-term drift effects of the resonance frequency. An reasonable application-specific compromise between the sensitivity and the measurement range can be selected by adjusting the excitation voltage, offering much flexibility. This novel approach turns out to be very promising for compact, cost-effective, wide-range pressure measurements in the vacuum range. |
DOI of the first publication: | 10.3390/act10080172 |
Link to this record: | urn:nbn:de:bsz:291--ds-345814 hdl:20.500.11880/31654 http://dx.doi.org/10.22028/D291-34581 |
ISSN: | 2076-0825 |
Date of registration: | 27-Aug-2021 |
Faculty: | NT - Naturwissenschaftlich- Technische Fakultät |
Department: | NT - Systems Engineering |
Professorship: | NT - Prof. Dr. Helmut Seidel |
Collections: | SciDok - Der Wissenschaftsserver der Universität des Saarlandes |
Files for this record:
File | Description | Size | Format | |
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actuators-10-00172.pdf | 3,39 MB | Adobe PDF | View/Open |
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