Please use this identifier to cite or link to this item: doi:10.22028/D291-34581
Title: Using the Nonlinear Duffing Effect of Piezoelectric Micro-Oscillators for Wide-Range Pressure Sensing
Author(s): Zengerle, Tobias
Stopp, Michael
Ababneh, Abdallah
Seidel, Helmut
Language: English
Title: Actuators
Volume: 10
Issue: 8
Publisher/Platform: MDPI
Year of Publication: 2021
Free key words: MEMS oscillator
pressure sensor
roof-tile-shaped mode
DDC notations: 500 Science
Publikation type: Journal Article
Abstract: This paper investigates the resonant behaviour of silicon-based micro-oscillators with a length of 3600 µm, a width of 1800 µm and a thickness of 10 µm over a wide range of ambient gas (N2 ) pressures, extending over six orders of magnitude from 10−3 mbar to 900 mbar. The oscillators are actuated piezoelectrically by a thin-film aluminium-nitride (AlN) layer, with the cantilever coverage area being varied from 33% up to 100%. The central focus is on nonlinear Duffing effects, occurring at higher oscillation amplitudes. A theoretical background is provided. All relevant parameters describing a Duffing oscillator, such as stiffness parameters for each coverage size as well as for different bending modes and more complex modes, are extracted from the experimental data. The so-called 2nd roof-tile-shaped mode showed the highest stiffness value of −97.3·107 m−2 s −2 . Thus, it was chosen as being optimal for extended range pressure measurements. Interestingly, both a spring softening effect and a spring hardening effect were observed in this mode, depending on the percentage of the AlN coverage area. The Duffing-effect-induced frequency shift was found to be optimal for obtaining the highest pressure sensitivity, while the size of the hysteresis loop is also a very useful parameter because of the possibility of eliminating the temperature influences and long-term drift effects of the resonance frequency. An reasonable application-specific compromise between the sensitivity and the measurement range can be selected by adjusting the excitation voltage, offering much flexibility. This novel approach turns out to be very promising for compact, cost-effective, wide-range pressure measurements in the vacuum range.
DOI of the first publication: 10.3390/act10080172
Link to this record: urn:nbn:de:bsz:291--ds-345814
ISSN: 2076-0825
Date of registration: 27-Aug-2021
Faculty: NT - Naturwissenschaftlich- Technische Fakultät
Department: NT - Systems Engineering
Professorship: NT - Prof. Dr. Helmut Seidel
Collections:SciDok - Der Wissenschaftsserver der Universität des Saarlandes

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