Please use this identifier to cite or link to this item: doi:10.22028/D291-33445
Title: Piezoelectric MEMS Linear Motor for Nanopositioning Applications
Author(s): Ruiz-Díez, Víctor
Hernando-García, Jorge
Toledo, Javier
Ababneh, Abdallah
Seidel, Helmut
Sánchez-Rojas, José Luis
Language: English
Title: Actuators
Volume: 10
Issue: 2
Publisher/Platform: MDPI
Year of Publication: 2021
Free key words: traveling wave
standing wave
bidirectional linear motion
DDC notations: 500 Science
Publikation type: Journal Article
Abstract: This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimized for travelling or standing wave generation, while the addition of 3D-printed legs allowed for a controlled contact and amplified displacement, a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders of several times the motor weight, with speeds of 1.7 mm/s by travelling waves generated at 6 V and 19.3 kHz. In this paper both travelling and standing wave motors are compared. By the optimization of various aspects of the device such as the vibrational modes, leg collocation and excitation signals, speeds as high as 35 mm/s, and payloads above 10 times the motor weight were demonstrated. The devices exhibited a promising positional resolution while actuated with only a few sinusoidal cycles in an open-loop configuration. Discrete steps as low as 70 nm were measured in the conveyance of 2-mg sliders.
DOI of the first publication: 10.3390/act10020036
Link to this record: urn:nbn:de:bsz:291--ds-334456
ISSN: 2076-0825
Date of registration: 1-Mar-2021
Faculty: NT - Naturwissenschaftlich- Technische Fakultät
Department: NT - Systems Engineering
Professorship: NT - Prof. Dr. Helmut Seidel
Collections:SciDok - Der Wissenschaftsserver der Universität des Saarlandes

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