@article{Ruiz-DíezHernando-GarcíaToledoAbabnehSeidelSánchez-Rojas_2021,
title={Piezoelectric MEMS Linear Motor for Nanopositioning Applications},
author={Ruiz-Díez, Víctor and Hernando-García, Jorge and Toledo, Javier and Ababneh, Abdallah and Seidel, Helmut and Sánchez-Rojas, José  Luis},
issn={2076-0825},
doi={http://dx.doi.org/10.22028/D291-33445},
series={2},
volume={10},
publisher={MDPI},
journal={Actuators},
year={2021}
}