Please use this identifier to cite or link to this item:
doi:10.22028/D291-27928
Title: | Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid |
Author(s): | Díaz-Molina, Alex Ruiz-Díez, Víctor Hernando-García, Jorge Ababneh, Abdallah Seidel, Helmut Sánchez-Rojas, José Luis |
Language: | English |
Title: | Micromachines |
Volume: | 10 |
Issue: | 5 |
Publisher/Platform: | MDPI |
Year of Publication: | 2019 |
Free key words: | traveling waves piezoelectric microactuator MEMS |
DDC notations: | 600 Technology |
Publikation type: | Journal Article |
Abstract: | A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 μm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid. |
DOI of the first publication: | 10.3390/mi10050283 |
Link to this record: | urn:nbn:de:bsz:291--ds-279286 hdl:20.500.11880/29989 http://dx.doi.org/10.22028/D291-27928 |
ISSN: | 2072-666X |
Date of registration: | 11-Nov-2020 |
Description of the related object: | Supplementary Materials |
Related object: | http://www.mdpi.com/2072-666X/10/5/283/s1 |
Faculty: | NT - Naturwissenschaftlich- Technische Fakultät |
Department: | NT - Systems Engineering |
Professorship: | NT - Prof. Dr. Helmut Seidel |
Collections: | SciDok - Der Wissenschaftsserver der Universität des Saarlandes |
Files for this record:
File | Description | Size | Format | |
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micromachines-10-00283.pdf | 3,09 MB | Adobe PDF | View/Open |
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