Please use this identifier to cite or link to this item: doi:10.22028/D291-27928
Title: Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid
Author(s): Díaz-Molina, Alex
Ruiz-Díez, Víctor
Hernando-García, Jorge
Ababneh, Abdallah
Seidel, Helmut
Sánchez-Rojas, José Luis
Language: English
Title: Micromachines
Volume: 10
Issue: 5
Publisher/Platform: MDPI
Year of Publication: 2019
Free key words: traveling waves
DDC notations: 600 Technology
Publikation type: Journal Article
Abstract: A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 μm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid.
DOI of the first publication: 10.3390/mi10050283
Link to this record: urn:nbn:de:bsz:291--ds-279286
ISSN: 2072-666X
Date of registration: 11-Nov-2020
Description of the related object: Supplementary Materials
Related object:
Faculty: NT - Naturwissenschaftlich- Technische Fakultät
Department: NT - Systems Engineering
Professorship: NT - Prof. Dr. Helmut Seidel
Collections:SciDok - Der Wissenschaftsserver der Universität des Saarlandes

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