Please use this identifier to cite or link to this item: doi:10.22028/D291-27504
Title: Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies
Author(s): Challier, Michel
Sonusen, Selda
Barfuss, Arne
Rohner, Dominik
Riedel, Daniel
Koelbl, Johannes
Ganzhorn, Marc
Appel, Patrick
Maletinsky, Patrick
Neu, Elke
Language: English
Title: Micromachines
Volume: 9
Issue: 4
Publisher/Platform: MDPI
Year of Publication: 2018
Free key words: diamond
color centers
DDC notations: 530 Physics
Publikation type: Journal Article
Abstract: Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an approach to conveniently fabricate such thin membranes with up to about one millimeter in size. We use commercially available diamond plates (thickness 50 μm) in an inductively coupled reactive ion etching process which is based on argon, oxygen and SF6. We thus avoid using toxic, corrosive feed gases and add an alternative to previously presented recipes involving chlorine-based etching steps. Our membranes are smooth (RMS roughness <1 nm) and show moderate thickness variation (central part: <1 μm over ≈200 × 200 μm2). Due to an improved etch mask geometry, our membranes stay reliably attached to the diamond plate in our chlorine-based as well as SF6-based processes. Our results thus open the route towards higher reliability in diamond device fabrication and up-scaling.
DOI of the first publication: 10.3390/mi9040148
Link to this record: urn:nbn:de:bsz:291--ds-275048
ISSN: 2072-666X
Date of registration: 12-Feb-2020
Faculty: NT - Naturwissenschaftlich- Technische Fakultät
Department: NT - Physik
Professorship: NT - Keiner Professur zugeordnet
Collections:SciDok - Der Wissenschaftsserver der Universität des Saarlandes

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