@article{ChallierSonusenBarfussRohnerRiedelKoelblGanzhornAppelMaletinskyNeu_2018, title={Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies}, author={Challier, Michel and Sonusen, Selda and Barfuss, Arne and Rohner, Dominik and Riedel, Daniel and Koelbl, Johannes and Ganzhorn, Marc and Appel, Patrick and Maletinsky, Patrick and Neu, Elke}, issn={2072-666X}, doi={http://dx.doi.org/10.22028/D291-27504}, series={4}, volume={9}, publisher={MDPI}, journal={Micromachines}, year={2018} }