Please use this identifier to cite or link to this item: doi:10.22028/D291-24382
Title: Inorganic-organic composites (ORMOCERs) as structured layers for microelectronics
Author(s): Popall, Michael
Meyer, Henning
Schmidt, Helmut K.
Schulz, Jochen
Language: English
Year of Publication: 1990
OPUS Source: Better ceramics through chemistry IV : symposium held April 16 - 20, 1990, San Francisco, California, U.S.A / ed.: Brian J. J. Zelinski … - Pittsburgh, Pa. : Materials Research Soc., 1990. — (Materials Research Society symposium proceedings ; 180), S. 995-1001
SWD key words: Ormocer
DDC notations: 620 Engineering and machine engineering
Publikation type: Conference Paper
Abstract: Enhanced integration, faster signal transmission and reduced size of mounting devices in components for microelectronics requires new patternable materials. Inorganic-organic copolymers (ORMOCERs = ORganically MOdified CERamics), prepared by sol-gel techniques have been developed for interconnection technologies in microelectronics. Photopolymerization is enabled by unsaturated hydrocarbon or epoxide substituents and UV-sensitive initiators. Using a frequency doubled Argon-ion laser at 257 nm for direct laser writing, patterned layers with high edge quality have been realized. In combination with high breakthrough voltages, low permittivity constants and high bulk resistivities they open interesting aspects for very large system integration techniques (VLSI).
Link to this record: urn:nbn:de:bsz:291-scidok-26792
ISBN: 1-558-99069-0
Date of registration: 5-Feb-2010
Faculty: SE - Sonstige Einrichtungen
Department: SE - INM Leibniz-Institut für Neue Materialien
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