@conferenceObjectPart{PopallMeyerSchmidtSchulz_1990,
title={Inorganic-organic composites (ORMOCERs) as structured layers for microelectronics},
author={Popall, Michael and Meyer, Henning and Schmidt, Helmut K. and Schulz, Jochen},
isbn={1-558-99069-0},
doi={http://dx.doi.org/10.22028/D291-24382},
year={1990}
}