Mechanische Eigenschaften und Zuverlässigkeit von Materialien in Mikrodimensionen

Abstract

Rapid developments in microtechnology place increasing demands on the mechanical properties of the materials involved as components are further miniaturized. The mechanical behavior of materials in small dimensions ("micromaterials") can be considerably different from the behavior of the same materials in bulk form. New mechanical test methods for micromaterials are presented and some of the special mechanical properties of these materials are discussed in order to continue the development of new micromaterials as well as to improve their reliability further fundamental research in this area is urgently needed.