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Titel: Phase Transformation and Characterization of 3D Reactive Microstructures in Nanoscale Al/Ni Multilayers
VerfasserIn: Sauni Camposano, Yesenia Haydee
Riegler, Sascha Sebastian
Jaekel, Konrad
Schmauch, Jörg
Pauly, Christoph
Schäfer, Christian
Bartsch, Heike
Mücklich, Frank
Gallino, Isabella
Schaaf, Peter
Sprache: Englisch
Titel: Applied Sciences
Bandnummer: 11
Heft: 19
Erscheinungsjahr: 2021
Freie Schlagwörter: reactive multilayers
black silicon
self-propagating reactions
phase transformation
sputtering
aluminum/nickel
rapid thermal annealing
DDC-Sachgruppe: 500 Naturwissenschaften
Dokumenttyp: Journalartikel / Zeitschriftenartikel
Abstract: Reactive multilayer systems represent an innovative approach for potential usage in chip joining applications. As there are several factors governing the energy release rate and the stored chemical energy, the impact of the morphology and the microstructure on the reaction behavior is of great interest. In the current work, 3D reactive microstructures with nanoscale Al/Ni multilayers were produced by alternating deposition of pure Ni and Al films onto nanostructured Si substrates by magnetron sputtering. In order to elucidate the influence of this 3D morphology on the phase transformation process, the microstructure and the morphology of this system were characterized and compared with a flat reactive multilayer system on a flat Si wafer. The characterization of both systems was carried out before and after a rapid thermal annealing treatment by using scanning and transmission electron microscopy of the cross sections, selected area diffraction analysis, and differential scanning calorimetry. The bent shape of multilayers caused by the complex topography of silicon needles of the nanostructured substrate was found to favor the atomic diffusion at the early stage of phase transformation and the formation of two intermetallic phases Al0.42Ni0.58 and AlNi3 , unlike the flat multilayers that formed a single phase AlNi after reaction.
DOI der Erstveröffentlichung: 10.3390/app11199304
Link zu diesem Datensatz: urn:nbn:de:bsz:291--ds-348286
hdl:20.500.11880/31841
http://dx.doi.org/10.22028/D291-34828
ISSN: 2076-3417
Datum des Eintrags: 13-Okt-2021
Fakultät: NT - Naturwissenschaftlich- Technische Fakultät
Fachrichtung: NT - Materialwissenschaft und Werkstofftechnik
NT - Physik
Professur: NT - Prof. Dr. Frank Mücklich
NT - Prof. Dr. Jürgen Eschner
Sammlung:SciDok - Der Wissenschaftsserver der Universität des Saarlandes

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