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Titel: The Effect of Cathodic Arc Guiding Magnetic Field on the Growth of (Ti0.36Al0.64)N Coatings
VerfasserIn: Chaar, Ana B. B.
Syed, Bilal
Hsu, Tun-Wei
Johansson-Jöesaar, Mats
Andersson, Jon M.
Henrion, Gérard
Johnson, Lars J. S.
Mücklich, Frank
Odén, Magnus
Sprache: Englisch
Titel: Coatings
Bandnummer: 9
Heft: 10
Verlag/Plattform: MDPI
Erscheinungsjahr: 2019
Freie Schlagwörter: physical vapor deposition
magnetic field
optical emission spectroscopy
coatings
grain size
DDC-Sachgruppe: 500 Naturwissenschaften
600 Technik
Dokumenttyp: Journalartikel / Zeitschriftenartikel
Abstract: We use a modified cathodic arc deposition technique, including an electromagnetic coil that introduces a magnetic field in the vicinity of the source, to study its influence on the growth of (Ti0.36Al0.64)N coatings. By increasing the strength of the magnetic field produced by the coil, the cathode arc spots are steered toward the edge of the cathode, and the electrons are guided to an annular anode surrounding the cathode. As a result, the plasma density between the cathode and substrate decreased, which was observed as a lateral spread of the plasma plume, and a reduction of the deposition rate. Optical emission spectroscopy shows reduced intensities of all recorded plasma species when the magnetic field is increased due to a lower number of collisions resulting in excitation. We note a charge-to-mass ratio decrease of 12% when the magnetic field is increased, which is likely caused by a reduced degree of gas phase ionization, mainly through a decrease in N2 ionization. (Ti0.36Al0.64)N coatings grown at different plasma densities show considerable variations in grain size and phase composition. Two growth modes were identified, resulting in coatings with (i) a fine-grained glassy cubic and wurtzite phase mixture when deposited with a weak magnetic field, and (ii) a coarse-grained columnar cubic phase with a strong magnetic field. The latter conditions result in lower energy flux to the coating’s growth front, which suppresses surface diffusion and favors the formation of c-(Ti,Al)N solid solutions over phase segregated c-TiN and w-AlN.
DOI der Erstveröffentlichung: 10.3390/coatings9100660
Link zu diesem Datensatz: urn:nbn:de:bsz:291--ds-297961
hdl:20.500.11880/30028
http://dx.doi.org/10.22028/D291-29796
ISSN: 2079-6412
Datum des Eintrags: 17-Nov-2020
Fakultät: NT - Naturwissenschaftlich- Technische Fakultät
Fachrichtung: NT - Materialwissenschaft und Werkstofftechnik
Professur: NT - Prof. Dr. Frank Mücklich
Sammlung:SciDok - Der Wissenschaftsserver der Universität des Saarlandes

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