Please use this identifier to cite or link to this item: doi:10.22028/D291-24619
Title: Wet chemical deposition of ATO and ITO coatings using crystalline nanoparticles redispersable in solutions
Author(s): Goebbert, Christian
Nonninger, Ralph
Aegerter, Michel A.
Schmidt, Helmut K.
Language: English
Year of Publication: 1999
OPUS Source: Thin solid films. - 351. 1999, 1/2, S. 79-84
SWD key words: Indium
DDC notations: 620 Engineering and machine engineering
Publikation type: Journal Article
Abstract: The deposition of SnO2:Sb (ATO) and In2O3:Sn (ITO) transparent conducting coatings on glass substrate has been demonstrated by many techniques such as CVD, sputtering, vacuum deposition and sol-gel process. This paper presents an alternative process for the deposition of such coatings at room temperature by spin, dip and spray coating techniques using solutions prepared with crystalline nanoparticles fully redispersed in water (for ATO, ITO) or alcohol (for ITO) with solid contents up to 10-15 Vol.%, respectively. The deposited green coatings have been sintered at temperature as high as 900 degrees C. In2O3:Sn coatings have a resistivity of 1.5 x 10(-2) Omega cm as sintered and 3.4 x 10(-3) Omega cm after annealing in nitrogen atmosphere, The resistivity of ATO single coatings shows a minimum rho = 1.7 x 10-2 Omega cm after annealing at 550 degrees C. SnO2:Sb coatings present long term stability but the resistivity of annealed ITO coatings steadily increases with time to a value three times higher. All coatings have a high optical quality with transmission in the visible range larger than 90%.
Link to this record: urn:nbn:de:bsz:291-scidok-29274
Date of registration: 6-Jul-2010
Faculty: SE - Sonstige Einrichtungen
Department: SE - INM Leibniz-Institut für Neue Materialien
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