Please use this identifier to cite or link to this item: doi:10.22028/D291-24400
Title: Fine patterning of thin sol-gel films
Author(s): Krug, Herbert
Merl, Norbert
Schmidt, Helmut K.
Language: English
Year of Publication: 1992
OPUS Source: Journal of non-crystalline solids. - 147/148. 1992, S. 447-450
SWD key words: Dünne Schicht
DDC notations: 620 Engineering and machine engineering
Publikation type: Journal Article
Abstract: An embossing technique was used to fabricate surface reliefs in organically modified ceramics of the Ormocer type, synthesized via the sol-gel route. Embossing techniques for these materials are described and results of embossed grids and gratings with up to 2400 lines/mm and peak-to-trough values up to 3 µm are presented.
Link to this record: urn:nbn:de:bsz:291-scidok-27054
Date of registration: 17-Feb-2010
Faculty: SE - Sonstige Einrichtungen
Department: SE - INM Leibniz-Institut für Neue Materialien
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