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Titel: MoSx thin films by thermolysis of a single-source precursor
Verfasser: Pütz, Jörg
Aegerter, Michel A.
Sprache: Englisch
Erscheinungsjahr: 2000
Quelle: Journal of sol-gel science and technology. - 19. 2000, S. 821-824
SWD-Schlagwörter: MOS
Dünne Schicht
Pyrolyse
Morphologie
Schleuderbeschichten
Sekundärneutralteilchen-Massenspektrometrie
Dekomposition
DDC-Sachgruppe: 620 Ingenieurwissenschaften und Maschinenbau
Dokumentart : Journalartikel
Kurzfassung: Thin films of MoSx have been prepared on silicon substrates by spin coating and thermolysis of 0.5 M solutions of alkyldiammonium tetrathiomolybdates in 1,2-ethanediamine (EDA) and 1,2-propanediamine (12PDA). The films have been heat treated in air at temperatures between 80 and 250°C and under N_2 atmosphere at temperatures between 300 and 800°C. X-ray diffraction shows a restricted crystallisation and amorphous residues in both kind of films. EDA-based films exhibit a high tendency to crystallise whereas 12PDA-based films form associated structures with the solvent preventing precursor crystallisation. An insight into the processes occurring in film formation is gained by infrared spectroscopy which indicates a beginning of the decomposition of the 12PDA-based film at temperatures as low as 80°C with incorporation of the diamine solvent. In contrast, the EDA-based films show first signs of a decomposition at 150°C. The decomposition of the intermediate MoS_3 in both cases starts between 250 and 300°C. By means of SNMS depth profiles carbon contents up to 21 and 32 atom-% were found in EDA- and 12PDA-based films, respectively. The films show a significant deficit of sulphur which is compensated by the carbon. Near the surface of the coatings a loss of carbon is observed.
Link zu diesem Datensatz: urn:nbn:de:bsz:291-scidok-25105
hdl:20.500.11880/24321
http://dx.doi.org/10.22028/D291-24265
SciDok-Publikation: 14-Dez-2009
Fakultät: Sonstige Einrichtungen
Fachrichtung: SE - INM Leibniz-Institut für Neue Materialien
Fakultät / Institution:INM
SE - Sonstige Einrichtungen

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