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Titel: Comparison of spray pyrolyzed FTO, ATO and ITO coatings for flat and bent glass substrates
Verfasser: Bisht, Harish
Aegerter, Michel A.
Mehrtens, Andre
Eun, H.-T.
Sprache: Englisch
Erscheinungsjahr: 1999
Quelle: Thin solid films. - 351. 1999, S. 109-114
SWD-Schlagwörter: Flachglas
Enzymsubstrat
Substrat <Chemie>
Abscheidung
Indium
Zinn
Pyrolyse
Optische Eigenschaft
Elektrische Eigenschaft
DDC-Sachgruppe: 620 Ingenieurwissenschaften und Maschinenbau
Dokumentart : Journalartikel
Kurzfassung: Transparent conductive FTO, ATO and ITO films were synthesized by spray pyrolysis technique on flat 12x12 cm borosilicate glass substrates at 500-550°C and investigated with respect to their electrical and optical properties. The resistivity of sprayed ITO films decreases with the thickness down to 3.0x10-4 &#937; cm (300 nm). The optical transmission in the visible range is 80% and the near IR reflection up to 96% for thicknesses larger than 300 nm. A reducing treatment at 400°C in forming gas still decreases the resistivity by a factor of two. Bending of the coated glasses in air at 650°C for 1.5 h increases the resistivity of the coatings on the tensile side of the substrate by a factor of 3-4 and by a factor 2 on the compressed side. A subsequent reducing treatment in forming gas at 400°C leads to a drastic decrease of resistivity in both cases by a factor of 5-7 with resulting value &#929;=2-3¡x10-4 &#937; cm. ATO layers have lower visible transmission (70-75%) due to stronger absorption and a higher resistivity (&#929;=1x10-3 &#937; cm). Spray pyrolyzed FTO coatings have a resistivity &#929;=5x10-3 &#937; cm for film thicknesses >350 nm.
Link zu diesem Datensatz: urn:nbn:de:bsz:291-scidok-24646
hdl:20.500.11880/24276
http://dx.doi.org/10.22028/D291-24220
SciDok-Publikation: 20-Nov-2009
Fakultät: Sonstige Einrichtungen
Fachrichtung: SE - INM Leibniz-Institut für Neue Materialien
Fakultät / Institution:INM
SE - Sonstige Einrichtungen

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