Please use this identifier to cite or link to this item: doi:10.22028/D291-24220
Title: Comparison of spray pyrolyzed FTO, ATO and ITO coatings for flat and bent glass substrates
Author(s): Bisht, Harish
Aegerter, Michel A.
Mehrtens, Andre
Eun, H.-T.
Language: English
Year of Publication: 1999
OPUS Source: Thin solid films. - 351. 1999, S. 109-114
SWD key words: Flachglas
Substrat <Chemie>
Optische Eigenschaft
Elektrische Eigenschaft
DDC notations: 620 Engineering and machine engineering
Publikation type: Journal Article
Abstract: Transparent conductive FTO, ATO and ITO films were synthesized by spray pyrolysis technique on flat 12x12 cm borosilicate glass substrates at 500-550°C and investigated with respect to their electrical and optical properties. The resistivity of sprayed ITO films decreases with the thickness down to 3.0x10-4 &#937; cm (300 nm). The optical transmission in the visible range is 80% and the near IR reflection up to 96% for thicknesses larger than 300 nm. A reducing treatment at 400°C in forming gas still decreases the resistivity by a factor of two. Bending of the coated glasses in air at 650°C for 1.5 h increases the resistivity of the coatings on the tensile side of the substrate by a factor of 3-4 and by a factor 2 on the compressed side. A subsequent reducing treatment in forming gas at 400°C leads to a drastic decrease of resistivity in both cases by a factor of 5-7 with resulting value &#929;=2-3¡x10-4 &#937; cm. ATO layers have lower visible transmission (70-75%) due to stronger absorption and a higher resistivity (&#929;=1x10-3 &#937; cm). Spray pyrolyzed FTO coatings have a resistivity &#929;=5x10-3 &#937; cm for film thicknesses >350 nm.
Link to this record: urn:nbn:de:bsz:291-scidok-24646
Date of registration: 20-Nov-2009
Faculty: SE - Sonstige Einrichtungen
Department: SE - INM Leibniz-Institut für Neue Materialien
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