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Titel: Laser firing of transparent conducting SnO2 sol-gel coatings
Verfasser: Ganz, Dietmar
Reich, Axel
Aegerter, Michel A.
Sprache: Englisch
Erscheinungsjahr: 1997
Quelle: Journal of non-crystalline solids. - 218. 1997, S. 242-246
SWD-Schlagwörter: Antimon
Zinn
Sol-Gel-Verfahren
Alkoholische Lösung
Tauchbeschichten
Fused Silica
DDC-Sachgruppe: 500 Naturwissenschaften
Dokumentart : Journalartikel
Kurzfassung: Sb doped sol-gel SnO2 films were prepared from 0.5 M alcoholic solution of SnCl2(OAc)2 doped with 5 mol% SbCl3 and deposited via a dip coating process on fused silica substrates. The coatings have been fired by CO2 laser irradiation by means of a 700 W cw CO2 laser using a fast scan mode in which the laser beam is scanned by a high speed rotating polygon scanner (wmax = 8800 rpm) in one direction and the sample is moved perpendicularly at a speed up to 250 mm/s. Areas can be densified at a typical rate of ≈ 12 cm2/s. The properties of the coatings have been measured by several methods: their sheet resistance, R, has been measured using a four-probe technique, the structure of the coatings has been determined by X-ray diffraction at grazing incidence, their thickness by a surface profiler and their morphology by transmission electron microscopy. The thickness of the coatings, the crystallite size and the sheet resistance are determined by thermal driven processes. The coatings are made of dense aggregates of spherical shaped crystallites. The smallest resistivity obtained for a 100 nm thick coating is p = 6 X 10-3 Ω cm a value that is three times lower than that obtained with conventionally heat treated samples.
Link zu diesem Datensatz: urn:nbn:de:bsz:291-scidok-24438
hdl:20.500.11880/24251
http://dx.doi.org/10.22028/D291-24195
SciDok-Publikation: 9-Nov-2009
Fakultät: Sonstige Einrichtungen
Fachrichtung: SE - INM Leibniz-Institut für Neue Materialien
Fakultät / Institution:INM
SE - Sonstige Einrichtungen

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