@article{AlsaadAl-BatainehQattanAhmadAbabnehAlbatainehAljarrahTelfah_2020, title={Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films}, author={Alsaad, A. M. and Al-Bataineh, Qais M. and Qattan, I. A. and Ahmad, Ahmad A. and Ababneh, A. and Albataineh, Zaid and Aljarrah, Ihsan A. and Telfah, Ahmad}, issn={2296-424X}, doi={http://dx.doi.org/10.22028/D291-38106}, volume={8}, publisher={Frontiers}, journal={Frontiers in Physics}, year={2020} }