@article{ZengerleAbabnehSeidel_2022,
title={Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime},
author={Zengerle, Tobias and Ababneh, Abdallah and Seidel, Helmut},
issn={2673-4117},
doi={http://dx.doi.org/10.22028/D291-35832},
series={1},
volume={3},
publisher={MDPI},
journal={Eng},
year={2022}
}