@article{AlhmoudBrodoceanuElnathanKrausVoelcker_2021, title={A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine}, author={Alhmoud, Hashim and Brodoceanu, Daniel and Elnathan, Roey and Kraus, Tobias and Voelcker, Nicolas H.}, issn={1873-2208}, doi={http://dx.doi.org/10.22028/D291-33147}, volume={116}, publisher={Elsevier}, journal={Progress in materials science}, year={2021} }