@conferenceObjectPart{MennigGierKrugSchmidt_1997, title={Preparation of micropatterns with profile heights up to 30 microns from silica sols}, author={Mennig, Martin and Gier, Andreas and Krug, Herbert and Schmidt, Helmut K.}, isbn={0-8194-2558-3}, doi={http://dx.doi.org/10.22028/D291-24545}, year={1997} }