@conferenceObjectPart{KasemannKrugSchmidt_1991, title={ORMOCERe (ORganically MOdified CERamics) als Werkstoffe in Mikrotechniken}, author={Kasemann, Reiner and Krug, Herbert and Schmidt, Helmut K.}, isbn={3-18-090933-1}, doi={http://dx.doi.org/10.22028/D291-24389}, year={1991} }