@article{TadaOhsakiAegerter_1990,
title={Structural difference of surface and sub-surface native oxides of evaporated amorphous silicon},
author={Tada, Masato and Ohsaki, Hisashi and Aegerter, Michel A.},
doi={http://dx.doi.org/10.22028/D291-24144},
year={1990}
}