@conferenceObjectPart{MöcklBauerKraftSanchezArzt_1994,
title={Detailed study of electromigration induced damage in Al and AlCuSi interconnects},
author={Möckl, U. E. and Bauer, M. and Kraft, Oliver and Sanchez, J. E. and Arzt, Eduard},
isbn={1-558-99238-3},
doi={http://dx.doi.org/10.22028/D291-23837},
year={1994}
}