@conferenceObjectPart{KraftSanchezArzt_1992, title={Quantitative analysis of electromigration-induced damage in Al-based interconnects}, author={Kraft, Oliver and Sanchez, J. E. and Arzt, Eduard}, isbn={1-558-99160-3}, doi={http://dx.doi.org/10.22028/D291-23833}, year={1992} }